BS IEC 62047-32:2019

BS IEC 62047-32:2019 Semiconductor devices. Micro-electromechanical devices. Test method for the nonlinear vibration of MEMS resonators

standard by British Standard / International Electrotechnical Commission, 01/29/2019

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Full Description

BS IEC 62047-32:2019 specifies the test method and test condition for the nonlinear vibrationof MEMS resonators. The statements made in this document apply to the development andmanufacture for MEMS resonators.

Cross References:
IEC 62047-1


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